• - Equipment Name :MLA 150 maskless aligner

• - Faculty :Faculty of Engineering and Applied Sciences

• - Department :Mechatronics and Robotics Engineering

• - Lab :

• - Manufacturer : Heidelberg Instruments https://heidelberg-instruments.com/product/mla150/

• - Model: MLA 150

• Special Features : Minimum feature size = 0.6 ?m, 128 gray levels, Backside alignment [3?, nm]= 1000

. By using a digital mirror device (DMD) as a dynamic mask, the MLA 150 for digital lithography overcomes the drawbacks of physical photomasks. Go from a digital design to a perfectly patterned substrate in minutes