Equipment Specifications

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Equipment

MLA 150 maskless aligner

Laboratory N/A
Manufacturer Heidelberg Instruments https://heidelberg-instruments.com/product/mla150/
Model MLA 150
Description & Special Features

. By using a digital mirror device (DMD) as a dynamic mask, the MLA 150 for digital lithography overcomes the drawbacks of physical photomasks. Go from a digital design to a perfectly patterned substrate in minutes

Note: Minimum feature size = 0.6 ?m, 128 gray levels, Backside alignment [3?, nm]= 1000