• - Equipment Name :Heidelberg Instruments uPG-101 Laser Lithography System

• - Faculty :Faculty of Engineering and Applied Sciences

• - Department :Mechatronics and Robotics Engineering

• - Lab :

• - Manufacturer : Heidelberg Instruments https://htlco.co.in/wp-content/uploads/2019/03/HIMT_Fact_Sheet_uPG_101.pdf

• - Model: uPG-101

• Special Features : maskless lithography aligner (write mode 4mm) with different substrates. Minimum structure size [um] :5. Write speed [mm2/minute]: 90. Substrate up to: 6" x6"

The ?PG 101 is a Tabletop micro pattern generator for direct writing applications and low volume mask making.The system can be used for applications such as MEMS, Bio MEMS, Integrated Optics, MicroFluidics or any other application that requires high precision, high-resolution microstructures.A personal computer is used as system control. The GUI based control software makes it easy for users to convert the designs, perform a manual or automatic alignment and start the exposure.